With this paper, The brand new lapping slurry and polishing slurry are launched. And the deliquescence degree of CLBO is fallen to least expensive. A brand new Doing the job technological innovation is also adopted. After rough sprucing, the focus of ultra-precision polishing slurry is elevated correctly. So does the extremely-precision sharpening pace, and the wiping pace is faster when compared to the deliquescence velocity. The CLBO crystal area roughness can reach 1nm and continue to keep the surface area high-quality well. Entry by way of your institution
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The normal electricity on the NIR laser however has the opportunity to generally be enhanced to tens of watts including 70 W [26] In the event the double-pass configuration could be utilized with the Yb:YAG SCF amplifier stage. Hence, Should the conversion efficiency of 31% from NIR to DUV may very well be nevertheless managed at this greater electricity condition, the common output electric power from the DUV laser at 258 nm may be a lot more than twenty W, which might be described as a remarkable electricity amount for the DUV laser and bring about the unanticipated DUV laser machining effects. Additionally, for top-power DUV laser, the UV injury of the nonlinear crystal, such as the Home windows for CLBO crystal plus the mirrors, is an additional critical parameter for long run and stable Procedure.
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LBO can also be a wonderful nonlinear crystal which is always placed on the SHG in the NIR for the environmentally friendly. The DUV laser is normally understood by two levels of SFG within the LBO crystals due to the fact there's no period-matching angle for LBO to convert the eco-friendly laser at 515 nm or 532 nm into the DUV straight by SHG [16]. Recently, the NSBBF crystal has also shown its prospective to obtain a higher conversion efficiency from 532 nm to 266 nm. The wander-off angle and deff with the NSBBF are Just about much like These of CLBO [seventeen].
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Cesium Lithium Borate (CsLiB6O10 or CLBO) is the simplest non-linear crystal which generates ultraviolet harmonics on the Nd:YAG essential laser wavelength. So that you can greatly enhance the hurt threshold, small CLBO surface roughness, by extremely-precision machining, is necessary. Since the CLBO crystal has quick hydroscopic response and micro scratches in machining, ultra-precise machining of your CLBO crystal is often a hard specialized trouble.
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The conversion efficiency from fundamental NIR to DUV is from 5% to 36% based on the reported results in Table 1. Increasing the conversion efficiency will reduce the burden on the click here look and set up of the basic laser amplifier together with the electrical electrical power consumption. A great beam top quality of the fundamental laser may even lead on the growing with the conversion performance as well as the right ability depth of the NIR and green laser inside the SHG and FHG method, respectively. The best conversion efficiencies from NIR to environmentally friendly and environmentally friendly to DUV laser by usage of CLBO crystal are 70% and around fifty%, respectively [twelve], which corresponds into the conversion performance of 35% from elementary to DUV.
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